NUC5I3RYH does not return from s3, need to power on

When in s3, the power button blinks. When I press it, it gets blue again. But this is all. Screen stays black, no audio feedback, e.g. when I insert/remove an UBS device.

Since I use hybrid suspend, I can switch off and on again, but this is not what I want.

I tried it also with Ubuntu, no difference.